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Figure 15
Measured efficiency data for a 300 lines mm−1 laminar Si-grating with an aspect ratio of 0.62 and a trapezoidal angle of 8° obtained at 2° incidence angle. Simulated curves were obtained with the REFLEC code with the profile depth as parameter. These results confirmed the profile depth measured by AFM.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 25| Part 1| January 2018| Pages 91-99
https://doi.org/10.1107/S1600577517015600
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