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Figure 6
Lang projection topograph of the CZ-Si wafer containing dislocations, taken with the 111 reflection using Mo Kα radiation. A part corresponding to that in Fig. 5[link] is shown.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 9| Part 3| April 2002| Pages 169-173
doi:10.1107/S0909049502004302
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