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Figure 3
Monte Carlo calculation of the XRD from dislocation half-loops with edge threading arms. Threading dislocation density ρT = 1 × 1010 cm−2, mean length of the misfit segments L = 1 µm. (a) Reciprocal space maps for the 1124 reflection for different epitaxial layer thicknesses. The diffraction vector is indicated by an arrow on the left map. (b) Diffraction peak profiles in skew geometry. The noisy lines are Monte Carlo simulations, and the smooth curves are fits that treat the diffraction intensity as due only to threading dislocations. (c) Apparent density of threading dislocations [\widetilde{\rho}_{{\rm T}}] and (d) apparent values [\widetilde{M}] of the Wilkens parameter obtained in these fits. (e) FWHM of the diffraction profiles of the reflections. Ψ is the angle between the reflection vector and the crystal surface.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 57| Part 2| April 2024| Pages 276-283
https://doi.org/10.1107/S160057672400089X
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