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Figure 6
Analysis of the partial roughness propagation effect for PEM films. (a) A GISAXS pattern for a PEM film with ten bilayers. Strong resonant diffuse scattering is indicated by the arrow. (b) A GISAXS pattern for a PEM film with 12 bilayers. The slice region for critical length analysis is indicated by the rectangle. (c) Vertical cuts from the 2D pattern [slice region in panel (b)] at different qy positions are plotted against qz. For clarity, the curves are shifted vertically without maintaining the scale. The modulation decreases as qy increases and disappears at qy = qcoor [labeled with red numerals from 1 to 10 in the bottom right of panel (c)].

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 55| Part 1| February 2022| Pages 195-203
https://doi.org/10.1107/S1600576721012267
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